Based on the analysis of the structure and vibration of hcm - i submicro cnc ultra - precision turning machine , the mechanical model of active vibration isolation system is set up in the paper 摘要本文以hcm -型亚微米超精密车床为研究背景，在分析了机床结构与振动的基础上，建立了机床主动隔振系统的力学模型。
Precision driving and its control technology are the foundation and one of key technologies in modem manufacturing industry , such as precision and super - precision finishing , micron / nanometer technology and so on 精密驱动及其控制技术是精密和超精密加工、微米纳米技术等现代制造业中前沿领域的基础和关键技术之一。
With the development of science and technology , the demand of ultraprecision machining and orientation technology gradually increases , which then increases the demand of micro - displacement actuator and orientation technology 随着科技的发展,超精密加工技术的要求越来越高,这也增加了对微位移驱动和定位技术发展的要求。
With the application of robots extending to ic manufacture , ultra - precision machining and high - precision machine assembly , there are more and more demands on speed , precision and efficiency for robots 随着机器人的应用领域深入到微电子封装、超精密加工、精密装配等方面,人们对机器人的速度、精度、效率等提出了越来越高的要求。
Silicon wafer machining mechanism , machining method and machining devices are summed up , research status is analyzed in its application , prospect on progress and research work for the future is conducted 摘要归纳总结了硅晶片的加工原理、加工方法和加工设备，分析了硅晶片超精密加工的研究现状，并对硅晶片超精密加工的发展趋势和今后的研究工作进行了展望。
In this dissertation , the general development situation of the mrf machine tool and cnc system are reviewed firstly , and the development and current research work of cnc and ultra - precision machine tool control strategy are summed up 本文首先综述了国内外磁流变抛光技术和数控系统的发展状况,对数控系统及超精密机床控制策略的发展和研究状况进行了总结。
