The main purpose of the research is to seek a means , which can realize three degrees high accuracy positioning using piezo actuator and flexure hinge structure . in chapter 1 , the aims of the thesis are presented . first the significance and urgency of the research on micro - positioning system are expounded 第一章综述了进行精密微位移系统研究的目的和意义，分析了构成微位移系统的各个组成部分的发展及优缺点，并回顾了精密定位微动平台在国内外的发展概况，确定了本论文的研究任务。
Combining magnetic levitation technology and linear motor drive technology , applying cad / cae method , a new magnetic levitation precise stage is designed and researched , which is step and precise position mechanism in 1c chip manufacture equipment of micro - electronics trade such as laser photolithography equipment . it is an innovative research 将磁悬浮技术和直线驱动技术相结合，采用cad cae技术手段设计研究了一种新型磁悬浮精密定位工作台，它是针对微电子行业ic芯片制造设备如光刻机而研制的快速步进、精密定位机构，是创新性研究。
Based on the application of finite element method , the dynamic equation of the new piezoelectric active member is formulated and the properties of its static state is also analysed . the theoretical analysis shows that its output displacement , output force and its work range is more great than the one - actuator intelligent active member . according to the theoretical analysis , it can be available to the vibration control and precision orientation 本文提出了双向式双压电驱动器的智能主动构件的设计思想，并已申报了专利，文中用有限元方法建立了该构件的动力学方程，并进行了静态特性的初步分析，理论分析表明该主动构件具有输出力、输出位移和工作范围大的特点，可作为自适应结构的振动和精密定位控制用。
The development status and trend of micro - electronics in china and others countries and the important influence of micro - electronics in the increase of world economy are discussed generally in this paper , and the research and development of laser lithography technology and equipment are summarized . the realistic significance , importance and feasibility of researching a new style of magnetic levitation ( maglev ) precision stage are narrated 论文系统地综述了国内外微电子技术的发展概况、发展趋势以及微电子产业在世界经济增长中具有的重大影响，概述了光刻技术和光刻设备的研究与发展状况，叙述了当前磁悬浮技术的研究及应用水平，阐明了研制新型磁悬浮精密定位平台的现实意义、重要性和可行性。
As a mature technology for its static and accurate positioning , is widely used in the fields of geoscience study , geoid survey and other survey applications , which has brought about a new revolution for the methods and ways of survey . the digital photogrammetry can effectively reduce the work of the field survey and alleviate the labor intensity . its output results , such as digital ground model and digital products , can be widely used for engineering construction ; the outlook of its application has a bright future Gps静态精密定位作为一种成熟技术已广泛应用于地球科学研究、大地测量等各个测绘应用领域，给测量手段和方式带来了一场新的革命；数字摄影测量技术可以有效减少野外测量的工作量，减轻劳动强度，其输出成果数字地面模型及其数字化产品，与工程建设结合最为紧密，应用前景非常广阔；遥感地质技术可为公路规划和设计从宏观上提供准确可靠的工程地质资料； cad作为一种可以极大地提高设计效率的有效手段已经被广泛采用，目前正朝着可视化、动态化、三维化方向发展。
The advanced control laboratory focuses on designing and developing strategies for control of contemporary electromechanical systems . current research areas include control of robot manipulators , multi - robot systems , visual tracking and control , control of induction motors , home automation , control of maglev systems , nano control , virtual reality , guidance and control of vehicles 尖端控制实验室是由傅立成老师所领导的研究群，研究范围涵盖国防、工业控制、奈米与磁浮精密定位技术、多群组机器人、影像追踪与视觉、虚拟实境、机器人学与控制理论发展等。
