The contents of this paper include : 1 . thermal profile mass flow controller ( mfc ) and glass rotor flow meter was used in the measurement and control of flux . the mfc was used to measure and control the flux , and the rotor flow meter was for the use of flux detection 本文主要工作如下： ( 1 )使用热分布式质量流量控制器和玻璃浮子流量计实现了mpt流量测量，质量流量控制器主要用于流量的测控，其精度为3 . 8 fs ，浮子流量计主要用于流量的监测，精度2 . 5 fs 。
A special clamp for etching optical fiber and depositing pd film on the fiber is designed . designed a encapsulation set of the characteristics that is dampproof , shake and eroding resisted . the experimental set - up for hydrogen sensing includes the light source , gas cell , mass flow controller , stainless steel helical tubing and the detector , etc . the experimental results are also discussed 本文还设计了一套光纤腐蚀用夹具、光纤封装加热夹具和一套光纤溅射镀膜实验夹具;设计并制作了一套具有防潮、抗震和抗腐蚀功效的光纤传感头封装装置;设计了一套由激光器、反应混合气室、光功率计、质子流量计和流量控制器等组成的氢气定标实验装置并对实验数据进行了分析与处理。
This machine adopts japanese pro - face touch screen and mitsubishi plc control technology . in addition , it is set with automatic gear - shifting vacuum gauge , a three - flow controller , side - installed heating tube , computer pid automatic temperature control , and two sets of flat magnetic controlled target , contra - variant magnetic - controlled power source , and contra - variant bias power with easy operation and top grade film layer . they are widely used in decorative film layer , and compound film layer in plating 该设备采用日本pro - face触摸屏和三菱plc集中控制装有电脑自动换档真空计，三路流量控制器，边装式加热管，电脑pid自动控温，配备两套边装式平面磁控靶，逆变式磁控电源和逆变式偏压电源，操作简单，膜层细腻，广泛适用于镀制各种装饰膜层和复合膜层。
This machine adopts japanese pro - face touch screen and mitsubishi plc control technology . in addition , it is set with automatic gear - shifting vacuum gauge , a two - flow controller , side - installed heating tube , computer pid automatic temperature control , and 32 sets contra - variant arc power supply and contra - variant bias power . they are widely used in plating different thick film layers of mono - metal and many compound film layers 该设备采用日本pro - face触摸屏和三菱plc集中控制装有电脑自动换档真空计，两路流量控制器，边装式加热管，电脑pid自动控温，配备32只逆变式弧电源和逆变偏压，适用于镀制各种特种单金属厚膜层或多钟金属复合膜层。
Using mass flux controller ( mfc ) , gas regulation system achieved accurate mix of two kinds of gases , steel bottle gas ( some compressed gas ) and zero air ( pure air ) . for the sake of data transmission between dynamic air regulator and other equipments in the monitoring air quality system , normal digital interface ( rs - 232c ) make correlative role of communication interface so that automatic survey could be achieved 本仪器采用国际先进的自动控制配气原理，采用精密质量流量控制器( mfc )来控制钢瓶气(某种压缩气体)与零空气(纯净无污染的空气)的混合比来得到精确浓度的校准气体，以便于对各种气体监测仪进行高精度校准。
This machine adopts high - level siemens plc concentration control , set up with computer controlled gear shifting vacuum gauge , and a three - flow controller , one set of contra - variant bias power and four - route contra - variant arc power supply , four side - installed heating tubes , computer pid automatic temperature control device , 60 and 100 two kinds versatile arc supply 该设备采用先进的西门子plc集中控制，装有电脑自动换档真空计和三路流量控制器，一套逆变偏压和四路逆变弧电源，边装式加热管四支，电脑pid自动控温， 60和100两种弧源通用。
