In this paper ， first , the author drew some important conclusions by analyzing several technical factors and experimental conditions which would have great influence on the quality of diamond thin films during mpcvd process ， including gas proportion ， the power of microwave ， the plasma ' s location , the nucleation technique , etc . . finally ， the author has successfully deposited nanocrystalline diamond thin films with 300nm crystal particles on the slick surface of silicon by using ch4 / h2 gases in the mpcvd system ， and the nanocrystalline diamond thin films was proved to have good field emission performance . all these researches will make the foundation for the field emission cathode of diamond films 本论文中，作者分析了mpcvd方法中气源成分比、微波功率、等离子体球的位置、成核技术等各种工艺条件对金刚石薄膜质量的影响，并总结得到了一些有意义的结论；同时，在自行研制的mpcvd沉积系统上，于4 - 7kpa 、 1000左右的热力学条件下，采用ch4 / h2气源气氛在光滑的硅衬底上制备出了晶粒尺寸在300纳米以下的纳米晶金刚石薄膜，测试得到了较好的薄膜场致电子发射性能，为金刚石薄膜场致发射冷阴极的研究工作打下了实验基础。
In the paper , we put forward the combination of micro electronic technology , mems technology and vacuum micro electronic technology to develop a micro electronic pressure sensor with overload protection . the pressure sensor consists . of elastic anode membrane , isolation layer , vacuum micro cavity and field emission catelectrode tip array with overload protection . such pressure sensor has many advantages , such as high temperature stability , radiation resistance , fast response , high sensitivity , small volume , simple secondary instruments and bulk production 本文在重庆市科技“十五”项目的资助下，提出利用微电子技术、 mems技术和真空电子技术相结合的方法，研究一种带过保护功能的真空微电子压力传感器，该压力传感器由带过保护的场致发射阴极锥尖阵列、弹性阳极膜、绝缘层、真空微腔所构成，具有温度稳定性好、抗辐射、快响应、高灵敏、体积小、二次仪表简单、可批量生产等优点，具有广泛的应用市场。
This paper also introduces the following contents according to principle of field emission and human visual system ( hvs ) : the display principle of fed panel and pulse width modulation ( pwm ) , the reason why pwm was used in fed system , driving method of pwm and two pwm methods used in present fed sample 此外,论文从场致发射原理和人眼视觉特性出发,介绍了fed显示屏的显示原理和脉冲宽度调制原理( pwm ) ,分析了fed采用pwm工作方式的原因, pwm工作方式实现彩色fed显示的驱动原理,还有目前本实验室fed样机所采用的两种pwm方案。
Our research works relate to the various methods of growth , purification and coating for carbon nanotubes , combination of fabrication technology of nano - material and micro structure , behaviors of field emission and ionization , and possibility of application under nano - microscale structure and so on 由于一维纳米材料特有的长径比具有优异的场致发射和离化特性，可以极大的降低工作电压，提高场致电子器件的可靠性和安全性，对实现器件微型化和实用化有着革命性的意义。
Flat panel display ( fpd ) test technology is a hot subject among display field . this paper puts forward fed parameters and test methods , parameters , steps and signals for photoelectric characteristic of panel units . also , test systems including test instruments , signal sources and supply power for fed parameters and photoelectric characteristic of panel units 本文提出了场致发射显示器( fed )整机参数和fed显示屏像元的光电特性的测试方法、测试参量、测试步骤和测试信号,建立了场致发射显示器( fed )整机参数和fed显示屏像元的光电特性的测试系统,包括测试仪器设备、信号源和供电电源。
Recently , a number of experiments and theoretical researches have showed that diamond thin films ， especially nanocrystalline diamond thin films , could emit electrons at very low fields , and be well suited for field emission cold cathode which is applied in many field emission applications , such as microwave vacuum devices and field emission displays 近年来，国内外不断有实验和理论研究表明，金刚石薄膜特别是纳米晶金刚石薄膜，在低的开启电压作用下，即可获得很高的场致发射电流密度，具有十分优秀的场致电子发射特性，是一种理想的场致发射阴极材料。
