This work analyses the characteristic of excimer laser at first , then an accurate energy distribution of the laser beam of wavelength 248nm is given out . depends on the theoretic analysis , a hollow waveguide is designed 本文从分析准分子激光器的光束特点出发,对波长为248nm的准分子激光光束的能量分布做了精确分析,设计加工了适于本krf准分子激光匀束的光波导。
Topics on computer interface control technologies are discussed in detail , together with hardware design on control circuit , interpolation algorithm , and control software . all of our efforts are concentrated in one purpose - to establish a cnc system suitable for excimer laser micro fabrication . based on computer local bus tech . , 本文针对由反应式步进电机驱动的微加工工作台控制和准分子激光器外触发控制特点，就计算机接口控制技术、硬件控制电路设计、插补算法求解、控制软件实现以及准分子激光微刻蚀加工过程进行了较详细的讨论。
Firstly , the paper discusses the characters , principles of excimer laser , and study on pulse discharge process . secondly , for the purpose of designing excimer laser , i spent a lot of time to researsh and finish electrode designing , reducing circuit inductance , spark gap designing , ns discharge , uv preionization , glow discharge 本论文首先对准分子激光特点，原理，脉冲放电进行了评述，其次，以试制xecl准分子激光器为目的，探索并完成了电极设计、回路电感减小方法、火花开关设计、 ns陡前沿放电、紫外预电离、辉光放电、脉冲功率技术研究。
Due to great advantage of the excimer laser in photoelectron material , photoelectron technology research , so in this thesis , a xecl excimer laser is designed in order to solve some problem in semiconductor film , cmr film , quartz film and other kind of film application , optical etching field , interaction between laser and material , material plasma study . the parameters of the excimer laser is e also measured and analyzed 因此本文以气相沉积、外延生长、巨磁薄膜、金刚石及其它薄膜制备及后续的光刻，激光与物质的相互作用，等离子体研究为目的，研制获得了激光脉宽18ns ，单脉冲能量150mj ，矩形光斑大小2cm 1cm ，束散角3mrad ，最高重复频率5hz的xecl准分子激光器。
