Has been recognized as an ideal substrate material for the rf surface acoustic wave ( saw ) filter , a key component within wireless communication devices as mobile phones . its stability and size make it the preferred option among other piezoelectric materials 为适用于高频表面声波滤波器( rfsawfilter )小型化的理想基材，由于具备适中的机电耦合系数且温度系数低，已被广泛应用在移动式高频无线通讯器材，尤其是手机里的关键材料。
Our final target is to measure and research the acoustic current which is produced by that saw carry the electron passing through the quasi - 1d electron channel at the cut off voltage of the quasi - 1d electron channel , so as to research the quantum acoustic current steps of the quasi - 1d electron channel 最终目标是在准一维电子通道的钳断点测量和研究声表面声波搬运电子通过准一维电子通道的声电电流,从而对准一维电子通道的声电流量子化台阶现象进行研究。
It has broad application prospect in the following fields such as microelectronics , photoelectronic devices , large screen flat panel display , field emitter array , acoustic surface wave device , photon crystal , light waveguide array , holographic honeycomb lens and micro - optical element array , micro - structure manufacture , fabrication of large area grating and grid of high resolution , photoresist performance testing , profile measurement and metrology , etc . the paper only involves the primary research of interferometric lithography 在微电子、光电子器件、大屏幕平板显示器、场发射器阵列、表面声波器件、光子晶体、光波导阵列、全息透镜和微光学元件阵列、微结构制造，高分辨、大面积光栅和网格制造，在抗蚀剂性能测试、面形测量和计量等领域，干涉光刻技术都具有广阔的应用前景。
Zno film is a novel - direct compound semiconductor with wide band gap energy of 3 . 37ev and a exciton binding energy 60mev at room temperature . due to its the prerequisite for visible or ultraviolet light emission at room temperature , it has the tremendous potential applications for ultraviolet detectors , leds , lds . zno thin film is used widely and effectively in the fields of surface acoustic wave devices , solar cell , gas sensors , varistors and so on because of its excellent piezoelectrical performance 室温下禁带宽度为3 . 37ev ，激子束缚能为60mev ，具备了室温下发射紫外光的必要条件，在紫外探测器、 led 、 ld等领域有着巨大的发展潜力； zno薄膜以其优良的压电性能、透明导电性能等使其在太阳能电池、压电器件、表面声波器件、气敏元件等诸多领域得到广泛应用。
The emphases of our research works are as follows : under ultra - low temperature ( about 0 . 236k ) conditions , how the frequency and power of the saw and the source drain voltage influence the acoustic current ; and the relationship between the source drain current and the split - gate voltage ; and how to find the cut off voltage of the quasi - 1d electron channel ; and also the frequency character of the idt in the saw parts 研究的重点为,在甚低温( 0 . 236k )下,通过实验研究表面声波的频率和功率,源漏偏压等因素对声电电流的影响;研究准一维电子通道中不同源漏电流与分裂门负偏压的关系,以找到分裂门的钳断点电压;以及研究声表面器件叉指换能器的频率特性等。
