Our experiment results showed that the photoluminescence mechanism of porous silicon was ascribed to the co - effect of quantum confinement and the surface materials of porous silicon 以上的多孔硅发光现象不能用单纯的量子限域机制进行解释，实验结果表明它是由量子限域和多孔硅表面物质共同作用的结果。
The low - loss distributed mems phase shifter fabricated on ps layers is studied , but how to achieve better performance needs further works . thick ps / ops layers will be very attractive inter - layers for silicon 1c applications 在硅基高频ic应用中，多孔硅/氧化多孔硅厚膜将是一种非常有吸引力的介质膜。
Fabricating the nanoporous silicon membrane with nanotechnology and bio - mems technology , the thickness of membrane , pore size and distribution , geometry shape and porosity can precisely controlled 摘要采用纳米技术和生物微电子机械系统技术制备纳米多孔硅膜，可准确控制膜的厚度、几何形状、孔大小、孔分布和孔隙率。
The ps was formed by photo - electrochemical means . anodization was carried out on n - type silicon ( 111 ) substrates with resistivity ( n + - n - si : 3 ? cm - 5 ? cm n - si : 80 ? cm - 100 ? cm ) 采用单面抛光的n型单晶硅片，晶面为( 111 ) ，电阻率为3 ? cm - 5 ? cm和80 ? cm ? 100 ? cm ，经过阳极氧化制得的多孔硅在紫外灯下发红橙光或红光。
