5 . manganin thin films with low temperature coefficient of resistance were prepared by magnetron sputtering . the changes of tcr under difference deposition and heat treatment conditions were studied 首次采用磁控溅射法沉积了低电阻温度系数的锰铜薄膜，研究了在不同电子科技大学博士学位论文沉积及热处理条件下薄膜tcr的变化。
Although the highest pressure in copper target was 107 gpa and that in alumina packaging was in the vicinity of 70 gpa , the gauge records showed a good plateau of about 1 um in duration and absence of shunt 实验中铜靶板上的最大压力达到了107gpa ，氧化铝封装中的压力也达70gpa以上，薄膜式锰铜计输出的信号波形完整，压阻信号的平台持续时间长，无明显的旁路存在。
Two chinese invention patents , which titled " manganin thin film ultra - high pressure sensors " and " preparation method of manganin thin films with low temperature coefficient of resistance " , have been applied based on the above original work of this thesis 以上第l 3创新点及第5创新点已经分别申请了两项中国发明专利： “薄膜式锰铜超高压力传感器”和“低电阻温度系数锰铜薄膜的制备方法” 。
1 . the manganin ultra - high pressure sensors for gas gun were made by two - step thin film techniques , namely , manganin thin films were first deposited by magnetron sputtering on a12o3 substrates , and then covered by a layer of a12o3 thin films by electron beam evaporation 首次采用全薄膜化工艺制作气炮用锰铜超高压力传感器，即首先在绝缘基板上沉积锰铜敏感薄膜，然后再在敏感膜的上面沉积绝缘封装薄膜。
In this dissertation , a new kind of thin film manganin gauge was fabricated by adopting new structure , new sensing and packaging materials , and new fabrication technique . the main conclusions and original results are summarized as fellows 本文通过传感器的结构设计、敏感材料和封装材料的研制以及采用新的传感器制备工艺，制作了一种新型的薄膜化的锰铜传感器，所得到的主要结论及创新性的结果可归纳如下： 1
In the early stage of experiment , an in - material thin film manganin gauge was studied . this in situ gauge was manufactured by single - step thin film processing , namely , manganin piezoresistance element was prepared on inorganic substrates such as ceramic , microcrystalline glass , etc by sputtering 在实验的初期，本文还研究了“在位式”的锰铜薄膜传感器，即首先在陶瓷或微晶玻璃基板上沉积锰铜敏感元件，然后用粘贴ptfe薄膜的方法完成传感器的封装。
The main conclusions and original results are summarized as follows . the manganin ultra - high pressure sensors for gas gun were made by two - step thin film techniques , namely , manganin thin films were first deposited by magnetron sputtering on fused silica substrates , and then covered by a layer of sio2 thin films by electron beam evaporation . consequently , the manganin sensing elements were " cleanly " encapsulated in inorganic solid matrix and the high - pressure shunt effect was eliminated radically 上述技术的主要优点在于可以采用高压绝缘性能更好的无机物作为绝缘封装材料，如本研究中所采用的sio2 ，而代替在箔式锰铜计中所使用的ptfe ；并可实现敏感元件“清洁”地无机固态封装，即将整个敏感元件是包封在无机物中，而不与高压力下绝缘性能相对较差的有机物，如粘接剂、树脂等直接接触，从而在根本上消除了高压旁路效应。
Shanghai lti automobile components co . , ltd . ( slti ) is a joint venture established by geely holding group and manganese bronze holdings , in which geely takes up 51 % stock shares , shanghai maple accounts for 1 % , totally 52 % for geely holding group as a controlling share holder while manganese bronze holdings occupies 48 % stock shares 上海英伦帝华汽车部件有限公司（简称英伦帝华）是吉利控股集团与英国锰铜控股集团共同成立的合资企业，其中吉利集团在合资企业中占51 %的股份，华普汽车占1 % ，锰铜控股占48 % ，中方以52 %的股份成为控股方。
