Structure and properties of ta - c films deposited by filtered cathodic vacuum arc technology as a function of substrate bias 衬底偏压对四面体非晶碳膜结构和性能的影响
The design of vacuum arcing chamber and insulation support sheath pipe is compact , because the outlet line conduct pole is coated silicon rubber , it can be suitable for bad weather and pollution environment 真空灭弧室和绝缘支柱套管设计紧凑，出线导电杆外注硅橡胶，能适应恶劣的气候条件和污秽环境。
The type vacuum arcing chamber is miniaturization product , adopts copper and chrome contactor material , cup shape and longitudinal magnetic field structure , glass insulation case , sealing type shield barrel in the plate 本型号真空灭弧室为小型化产品，采用铜铬触头材料，杯状纵磁场结构，玻璃绝缘外壳，盘片中间封接式屏蔽筒。
The product vacuum arcing chamber adopts porcelain case , cup shape and longitudinal magnetic field contactor structure , copper and chrome contactor material , it has the capacity of good open and close short circuit current 本产品真空灭弧室采用陶瓷外壳，杯状纵磁场触头结构，铜铬触头材料，具有优良的开断和关合短路电流能力。
Mevva ion source , researched by our institute since 1988 with adoption of cathode vacuum arc technology , has won the support from 863 plan of the government for four five - year plans from seventh five - year plan to tenth five - year plan 我所从1988年起采用阴极真空弧技术研制mevva离子源，连续获得国家“ 863 ”计划从“七五”到“十五”四个五年计划支持。
The product vacuum arcing chamber adopts porcelain insulation case , the contactor adopts wolfram and copper material , it has the advantage of reliable performance , long life , small volume , no explosion danger , no pollution environment 该型号真空灭弧室采用陶瓷绝缘外壳，触头采用钨铜材料，具有性能可靠、寿命长、体积小、无爆炸危险，不污染环境等优点。
Its magnetic field intensity is much higher than the original structure and there is an obvious improvement along the radial distribution . according to vacuum arc theory , we think the breaking current density could be raised by this new structure 该结构开断时在断口空间产生的纵向磁感应强度较原杯状纵磁场结构有较大的提高,且沿径向的分布有明显的改善。
According to vacuum arc theory , the contact structure of vacuum interrupter is changed to produce magnetic field in the open space of the switching house . hence , the short - circuit current breaking capability in vacuum interrupter can be enhanced 根据真空电弧理论,人们通过改变真空灭弧室触头结构,使其开断时在断口空间产生磁场,以此来提高真空灭弧室的短路电流开断密度。
Based on analysis for vacuum arc remelting process and according to actual melting condition , some partial strategies which is helpful for control of melting aim were presented , for example , arc length control , melting speed control , decouple control and so on 摘要通过对真空电弧重熔炉工艺过程的分析，根据冶炼实际情况，提出了一些有助于控制冶炼目标的局部策略，如弧长控制、熔速控制、解耦控制等。
Surface morphology , phase constitution and biocompatibility of the material were analyzed and evaluated in this paper . titanium alloys were prepared by non - consumable vacuum arc smelting furnace . and the microstructures and the properties of titanium alloys were investigated 采用非自耗真空电弧凝壳炉熔炼钛及钛合金，并对钛合金的组织及性能进行观察和测定，分析了电弧炉熔炼钛合金的结晶特点。
