This subject is a research about manufacturing silicon magnetic - transistor with rectangle - plank cubic construction on silicon surface by mems technology , meanwhile it also makes a experiment - research on characteristic of silicon magnetic - transistor manufactured experiment expresses that silicon magnetic - transistor with rectangle plank cubic construction which is made by mems technology owns many virtues , which are as follows : first , stronger v - i characteristic curves and higher magnetic sensitivity ( collector current magnetic sensitivity of sample can achieve to 227 % / t ) , second , lower negative - temperature coefficient that is small 本课题主要研究采用mems技术在硅片上制作矩形板状立体结构硅磁敏三极管，并对制作的硅磁敏三极管样品基本特性进行实验研究。实验结果表明本课题采用mems技术设计、制作的矩形板状立体结构的硅磁敏三极管样品具有较理想的伏安特性曲线、具有较高的磁灵敏度(样品集电极电流磁灵敏度可达227 / t ) 、具有负温度系数且温度系数较小、在磁场一定时i _ c i _ b线性关系较好等优点。
