In this experiment , a neodymium glass laser is used to study the effects of the operating voltage , power density , the height from the observed location of the plasma to the surface of the sample , the location of the sample , the gas composition and the pressure on the intensity and quality of the spectrum 本文采用高能量钕玻璃激光器，研究了激光器工作电压、功率密度、等离子体的观测高度、样品位置、环境气体及气压对等离子体的谱线强度及谱线质量的影响，获得了最佳的实验条件，并测量了金属分析样品中某些元素的含量。
The variation of the film composition can be monitored by using the method of spectrum analysis during the film deposition ( for the intensity of the persistent line is proportional to the particle density of the element in the vacuum chamber ) . the measurement of the transmission spectrum of the film on a transparent substrate can be used to calculate the film parameters , such as refractive index , extinction coefficient and the thickness of the film . therefore , the combination of the two methods would be helpful to on line monitoring the film constituents and the optical paramenters in the preparation of thin films 在制备薄膜的过程中，利用光谱分析的方法，以放电光谱特征谱线强度的变化来反映相应物质成分的变化，以连续光谱光源发出的光透射过薄膜的透射率的变化，来反映薄膜的厚度、折射率、吸收系数等光学参数的变化，从而达到在制膜过程中，对薄膜的成分、厚度等参数进行在线监控的目的
The optimized experimental conditions are determined and the densities of some elements in the mental alloy standard samples are measured . the experimental results shows that the spectral intensity of the plasma enhances significantly with the increase of the operating voltage and the power density . ( 1 ) to the steel ally sample , the emission intensities of the spectra reach to the maximum values when the laser operating voltage is 1600v and the argon pressure is 600 torr . under the same pressure , the spectral intensity of the plasma in the argon atmosphere is stronger than that in the air . when the argon pressure is 320 to rr , the signal - noise ration is about 5 times than that which the argon pressure is 700 torr , but the temperature of plasma is less about 1000k ( 1 )对于光谱标钢准样品，当激光器工作电压为1600v 、氩气压力为600乇时，谱线强度达到最大，并且在相同压强下，氩气中的等离子体与空气中的等离子体相比，其辐射强度明显增强；氩气压力为320乇时的谱线信背比约为600乇条件下的5倍，而等离子体温度却下降了近1000k ，即等离子体温度随环境气压的增大而增大；当激光束的焦斑在样品表面上下移动时，激光诱导量、等离子体的激发温度、谱线强度都呈不对称性分布，其最大值对应的焦斑位置都位于样品表面之下0 . 4mm左右。
