The results show that the elastic membrane thickness , actuator span and gap spacing have a strong effect on the deflection , the actuator undergoes the deflection increasing nonlinearly at voltages below pull - in voltage and snap through instability at voltages above pull - in voltage when subjected to a voltage ramp , the re - set time and repeatability are attractive when the actuated voltage is set to zero 结果表明，驱动器的弹性薄板厚度、跨度和电极间距明显影响变形位移；驱动器的变形位移随驱动电压的增加出现稳定的非线性增加和不稳定的“拉入”现象；驱动电压撤除后镜面回复时间短，重复性好。
