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反应溅射

"反应溅射"的翻译和解释

例句与用法

  • Dlc and a - sic : h films were prepared by the rf glow discharge and the reactive sputtering method respectively . there were two reasons that we chose y rays , ultraviolet ( uv ) photons , and neutrons as radiation sources . one is that y rays , uv photons and neutrons irradiation are serious at outer space and / or nucleus irradiation enviromentthe other is that the study on y rays irradiation on the films is a new and an important directioaotherwisejirnited reports have been made of the investigation on the uv photonsjieutrons irradiation influences on these films
    本文分别采用射频( 13 . 56mhz )等离子体cvd及射频反应溅射方法制得了dlc及a - sic : h薄膜。文中主要选择y射线、紫外光及中子作为辐照源有两方面的原因:一方面,在外层空间, y射线及紫外光辐射十分严重,而在核辐射环境下y射线及中子辐射也不可忽视;另一方面, y射线辐照这两种薄膜完全是一项开创性的工作,同时国内外对紫外光子、中子与这两种薄膜作用的研究也很少。
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