初步数据

• In a word , the two type of voa both have valuable applicability and potential market . the author have done numerous processing to work out new processing such as polymer coating and cure and triple - layer - metal film vaporing . other new processing , polymer ultra - violet ( uv ) cure and inductively - coupled plasma ( icp ) etching were studied
  作者经过反复的工艺实验，确定了聚合物波导涂膜和固化、三层金属电极蒸发和腐蚀等新工艺的参数，并得到了聚合物紫外固化、等离子体刻蚀等新工艺的初步数据。